- 专利标题: RADIO FREQUENCY (RF) SYSTEM WITH EMBEDDED RF SIGNAL PICKUPS
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申请号: US17514815申请日: 2021-10-29
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公开(公告)号: US20230132660A1公开(公告)日: 2023-05-04
- 发明人: Chelsea Dubose , Barton Lane , Merritt Funk , Justin Moses , Yohei Yamazawa
- 申请人: Tokyo Electron Limited
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; H01Q13/18 ; H01Q1/38 ; H01Q7/00
摘要:
A radio frequency (RF) system including: a first conductive covering surface, a portion of the first conductive covering surface including a portion of the first outer wall of a first RF device; a second conductive covering surface aligned to the first conductive covering surface, the second conductive covering surface being disposed around the insulating hole; an insulating hole for an RF center conductor extending through the first conductive covering surface and the second conductive covering surface, the first conductive covering surface and the second conductive covering surface being disposed around the insulating hole; a cavity bounded by the first conductive covering surface and the second conductive covering surface, the cavity being an insulating region; and an RF signal pickup disposed within the cavity.
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