- 专利标题: SEMICONDUCTOR PLACING IN PACKAGING
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申请号: US17586781申请日: 2022-01-28
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公开(公告)号: US20230137490A1公开(公告)日: 2023-05-04
- 发明人: Jen-Yuan Chang
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 主分类号: H01L23/00
- IPC分类号: H01L23/00
摘要:
A method for placing a semiconductor onto a substrate is provided. The method includes the following steps: transferring, using a placement tool, the semiconductor along a path over onto the substrate; lowering, using the placement tool, the semiconductor to a predetermined height above the substrate; titling, using the placement tool, the semiconductor, to a predetermined angle; determining, using the placement tool, a first contact point of the semiconductor to the substrate at the predetermined angle; determining, using the placement tool, the first contact point is shift-off from an alignment position on the semiconductor with respect to the substrate; adjusting, using the placement tool, the first contact point to correct the shift-off; and lowering, using the placement tool, the semiconductor to make a first contact with the substrate at the corrected first contact point.
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