Invention Publication
- Patent Title: THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF
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Application No.: US18321433Application Date: 2023-05-22
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Publication No.: US20240006516A1Publication Date: 2024-01-04
- Inventor: Yong Hae KIM , Chi-Sun HWANG , Jong-Heon YANG
- Applicant: Electronics and Telecommunications Research Institute
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Priority: KR 20220079625 2022.06.29
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/786

Abstract:
An embodiment of the inventive concept provides a thin film transistor and a manufacturing method of the same. The manufacturing method includes forming a data electrode on one side of a substrate, forming a spacer layer on a portion of the data electrode and the other side of the substrate, forming a drain electrode on a top surface of the spacer layer, forming an active layer on a sidewall of the spacer layer, the drain electrode, and the data electrode, forming a gate insulation film that covers the active layer on the sidewall of the spacer layer, and forming a doped layer on the gate insulation film and the active layer outside the gate insulation film to form impurity regions at both sides, respectively, of the active layer.
Information query
IPC分类: