Invention Publication
- Patent Title: SINGLE PHOTON AVALANCHE DIODE
-
Application No.: US18220069Application Date: 2023-07-10
-
Publication No.: US20240014341A1Publication Date: 2024-01-11
- Inventor: Isobel NICHOLSON , Sara PELLEGRINI , Dominique GOLANSKI , Alexandre LOPEZ
- Applicant: STMicroelectronics (Research & Development) Limited , STMicroelectronics (Crolles 2) SAS
- Applicant Address: GB Marlow
- Assignee: STMicroelectronics (Research & Development) Limited,STMicroelectronics (Crolles 2) SAS
- Current Assignee: STMicroelectronics (Research & Development) Limited,STMicroelectronics (Crolles 2) SAS
- Current Assignee Address: GB Marlow; FR Crolles
- Priority: EP 306042.7 2022.07.11
- Main IPC: H01L31/107
- IPC: H01L31/107 ; H01L27/146 ; H01L31/02 ; H01L31/0352

Abstract:
A device includes a single photon avalanche diode in a portion of a substrate, wherein the portion has an octagonal profile. The octagonal profile is delimited by a wall forming an octagonal contour around the portion. The device further includes an array of diodes, wherein each diode is located in a corner between four adjacent single photon avalanche diodes. Each single photon avalanche diode further includes a doped anode region. A shallow trench isolation is formed in each doped anode region. A polysilicon line forming a resistor is supported at the upper surface of the shallow trench isolation.
Information query
IPC分类: