Invention Publication
- Patent Title: COATING DEVICE
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Application No.: US18043359Application Date: 2021-08-18
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Publication No.: US20240024912A1Publication Date: 2024-01-25
- Inventor: Kazunori MAEDA , Kenji KITAJIMA , Atsushi WATANABE , Masashi MOTOI
- Applicant: TORAY ENGINEERING CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: TORAY ENGINEERING CO., LTD.
- Current Assignee: TORAY ENGINEERING CO., LTD.
- Current Assignee Address: JP Tokyo
- Priority: JP 20146729 2020.09.01
- International Application: PCT/JP2021/030258 2021.08.18
- Date entered country: 2023-02-28
- Main IPC: B05C5/02
- IPC: B05C5/02 ; B05C11/10

Abstract:
A coating device comprises a die with a slit that is longer in a width direction and discharges a coating liquid to form a coating film on a substrate, a first flow path that supplies the coating liquid toward the die, a first manifold that is linked to the first flow path and holds the coating liquid that flows in from the first flow path, a plurality of second flow paths that are linked to the first manifold, a second manifold that is linked to the second flow paths and the slit, is longer in the width direction, and holds the coating liquid that flows in from the second flow paths, and an adjustment unit that is provided along at least one of the second flow paths and adjusts a flow of the coating liquid flowing through the at least one of the second flow paths.
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