Invention Publication
- Patent Title: IMAGE SENSOR AND METHOD OF FABRICATING THE SAME
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Application No.: US18183583Application Date: 2023-03-14
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Publication No.: US20240030263A1Publication Date: 2024-01-25
- Inventor: Kook Tae KIM , Jingyun KIM , Byeongtaek BAE , Seunghwi YOO
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR 20220090591 2022.07.21
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
An image sensor comprises a substrate having first and second surfaces opposite to each other, a fixed charge layer in contact with the second surface, an interlayer dielectric layer covering the first surface, a device isolation part adjacent to the first surface in the substrate, and a pixel isolation part in the substrate. The pixel isolation part includes a conductive pattern, a buried dielectric pattern, and an isolation dielectric pattern that is simultaneously in contact with the fixed charge layer and the interlayer dielectric layer. The isolation dielectric layer has a first thickness at a level between the buried dielectric pattern and the conductive pattern. The isolation dielectric layer has a second thickness at a level of a bottom surface of the fixed charge layer. The second thickness is different from the first thickness.
Information query
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