Invention Publication
- Patent Title: MRAM STRUCTURE WITH RAISED EDGE OF TUNNEL BARRIER LAYER
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Application No.: US17814243Application Date: 2022-07-22
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Publication No.: US20240032435A1Publication Date: 2024-01-25
- Inventor: Koichi Motoyama , Oscar van der Straten , Chih-Chao Yang
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY ARMONK
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY ARMONK
- Main IPC: H01L43/08
- IPC: H01L43/08 ; H01L27/22 ; H01L43/02 ; H01L43/12 ; G11C11/16

Abstract:
Embodiments of present invention provide a method of forming a MRAM structure. The method includes patterning a bottom electrode layer and a first ferromagnetic layer on top of the bottom electrode layer; depositing a dielectric layer, the dielectric layer covering the bottom electrode layer and the first ferromagnetic layer; creating an opening in the dielectric layer, the opening exposing a portion of the first ferromagnetic layer; forming a tunnel barrier layer inside the opening; forming a second ferromagnetic layer on top of the tunnel barrier layer; patterning the tunnel barrier layer and the second ferromagnetic layer; and forming a top electrode layer on top of the second ferromagnetic layer. Structures formed thereby are also provided.
Information query
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