AMORPHOUS BORON NITRIDE COMPOUND, BORON NITRIDE FILM INCLUDING THE SAME, AND ELECTRONIC DEVICE INCLUDING THE BORON NITRIDE FILM
Abstract:
An amorphous boron nitride compound may include a boron nitride compound, where the boron nitride compound may be amorphous and may be doped with carbon or hydrogen. In the boron nitride compound, a total content of the carbon or the hydrogen may be in a range of about 0.1 at % to about 35 at % of a total atomic content.
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