- 专利标题: ION SOURCE AND OPERATING METHOD THEREOF
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申请号: US18361160申请日: 2023-07-28
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公开(公告)号: US20240038499A1公开(公告)日: 2024-02-01
- 发明人: Yuta IWANAMI , Yuya HIRAI , Suguru ITOI , Weijiang ZHAO
- 申请人: Nissin Ion Equipment Co., Ltd.
- 申请人地址: JP Koka-city
- 专利权人: Nissin Ion Equipment Co., Ltd.
- 当前专利权人: Nissin Ion Equipment Co., Ltd.
- 当前专利权人地址: JP Koka-city
- 优先权: JP 22122482 2022.08.01
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; C23C14/48
摘要:
An ion source includes a vaporizer, a plasma chamber, and a controller. The vaporizer produces a reaction product by supplying, through a first gas supply line to a crucible in which a solid material is installed, a reactive gas that reacts with the solid material, and vaporizes the reaction product by heating the crucible with a heater. The plasma chamber is supplied with a vapor from the vaporizer through a vapor supply line, and has a second gas supply line connected to the plasma chamber separately from the vapor supply line. The controller controls the heater to heat the crucible while a gas is being supplied from the second gas supply line to the plasma chamber and stops a supply of the reactive gas through the first gas supply line to the crucible.
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