Invention Publication
- Patent Title: FACEPLATE HAVING A CURVED SURFACE
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Application No.: US18381534Application Date: 2023-10-18
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Publication No.: US20240044000A1Publication Date: 2024-02-08
- Inventor: Shailendra SRIVASTAVA , Sai Susmita ADDEPALLI , Nikhil Sudhindrarao JORAPUR , Daemian Raj BENJAMIN RAJ , Amit Kumar BANSAL , Juan Carlos ROCHA-ALVAREZ , Gregory Eugene CHICHKANOFF , Xinhai HAN , Masaki OGATA , Kristopher ENSLOW , Wenjiao WANG
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: C23C16/455
- IPC: C23C16/455 ; H01J37/32 ; C23C16/50 ; C23C16/458

Abstract:
A faceplate for a substrate process chamber comprises a first and second surface. The second surface is shaped such that the second surface includes a peak and a distance between the first and second surface varies across the width of the faceplate. The second surface of the faceplate is exposed to a processing volume of the process chamber. Further, the faceplate may be part of a lid assembly for the process chamber. The lid assembly may include a blocker plate facing the first surface of the faceplate. A distance between the blocker plate and the first surface is constant.
Public/Granted literature
- US12110590B2 Faceplate having a curved surface Public/Granted day:2024-10-08
Information query
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