- 专利标题: METHOD FOR PRODUCING A BORON EMITTER ON A SILICON WAFER
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申请号: US18257078申请日: 2021-12-14
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公开(公告)号: US20240063323A1公开(公告)日: 2024-02-22
- 发明人: Enrico JARZEMBOWSKI , Maximilian KAUERT , Stefan PETERS
- 申请人: HANWHA Q CELLS GMBH
- 申请人地址: DE Bitterfeld-Wolfen
- 专利权人: HANWHA Q CELLS GMBH
- 当前专利权人: HANWHA Q CELLS GMBH
- 当前专利权人地址: DE Bitterfeld-Wolfen
- 优先权: DE 2020133390.0 2020.12.14
- 国际申请: PCT/DE2021/101003 2021.12.14
- 进入国家日期: 2023-08-08
- 主分类号: H01L31/18
- IPC分类号: H01L31/18
摘要:
A method for producing a boron emitter on at least one silicon wafer, arranged in a tube furnace, including: a step for forming borosilicate glass on the silicon wafer, including in the sequence given: a) evacuating the tube furnace to a specified pressure, b) feeding reagents, having BCU and O2, into the tube furnace and adjusting to a further specified pressure, c) stopping the supply after expiry of a specified period and allowing the reagents supplied to react with each other and a surface of the silicon wafer for a specified period to form a layer of borosilicate glass on the surface of the silicon wafer, and d) evacuating the tube furnace on expiry of the specified period.
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