- 专利标题: FILM-FORMING COMPOSITION HAVING A MULTIPLE BOND
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申请号: US18270375申请日: 2022-01-26
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公开(公告)号: US20240085792A1公开(公告)日: 2024-03-14
- 发明人: Tomotada HIROHARA , Mamoru TAMURA
- 申请人: NISSAN CHEMICAL CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: NISSAN CHEMICAL CORPORATION
- 当前专利权人: NISSAN CHEMICAL CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP 21011398 2021.01.27
- 国际申请: PCT/JP2022/002761 2022.01.26
- 进入国家日期: 2023-06-29
- 主分类号: G03F7/11
- IPC分类号: G03F7/11 ; C08G63/688 ; C09D167/00
摘要:
A composition for forming a resist underlayer film that enables the formation of a desired resist pattern; and a method for producing a resist pattern and a method for producing a semiconductor device, each of which uses the composition for forming a resist underlayer film. (In formula (1), A1, A2, A3, A4, A5, and A6 each independently represent a hydrogen atom, methyl group, or ethyl group; Q1 represents a divalent organic group; R1 represents a tetravalent organic group; and R2 represents an alkenyl group or alkynyl group having 2-10 carbon atoms.) The film-forming composition contains a solvent and a polymer that has a unit structure given by formula (1).
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