METHOD FOR MANUFACTURING VIBRATOR
摘要:
A method for manufacturing a vibrator includes: a preparation process of preparing a quartz-crystal wafer including a vibrator and a holding portion, the vibrator including a support portion and a vibration part arranged side by side along a first direction, the holding portion being coupled to one end portion of the support portion in a second direction intersecting the first direction; an adhering process of fixing at least the support portion and the holding portion of the quartz-crystal wafer to a film via an adhesive; and a singulation process of stretching the film along the second direction, and separating and singulating the vibrator from the holding portion.
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