- 专利标题: METHOD FOR MANUFACTURING VIBRATOR
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申请号: US18457844申请日: 2023-08-29
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公开(公告)号: US20240088859A1公开(公告)日: 2024-03-14
- 发明人: Atsushi Matsuo , Katsuhiko Maki
- 申请人: SEIKO EPSON CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: SEIKO EPSON CORPORATION
- 当前专利权人: SEIKO EPSON CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP 22139032 2022.09.01
- 主分类号: H03H3/02
- IPC分类号: H03H3/02 ; H03H9/19
摘要:
A method for manufacturing a vibrator includes: a preparation process of preparing a quartz-crystal wafer including a vibrator and a holding portion, the vibrator including a support portion and a vibration part arranged side by side along a first direction, the holding portion being coupled to one end portion of the support portion in a second direction intersecting the first direction; an adhering process of fixing at least the support portion and the holding portion of the quartz-crystal wafer to a film via an adhesive; and a singulation process of stretching the film along the second direction, and separating and singulating the vibrator from the holding portion.
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