Invention Publication
- Patent Title: METHODS FOR PROVIDING A PRECURSOR MIXTURE TO A REACTION CHAMBER
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Application No.: US18462938Application Date: 2023-09-07
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Publication No.: US20240102156A1Publication Date: 2024-03-28
- Inventor: René Henricus Jozef Vervuurt , Timothee Blanquart
- Applicant: ASM IP Holding, B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding, B.V.
- Current Assignee: ASM IP Holding, B.V.
- Current Assignee Address: NL Almere
- Main IPC: C23C16/04
- IPC: C23C16/04 ; C23C16/32 ; C23C16/34
Abstract:
Methods and systems for mixing precursors are disclosed. Systems and methods disclosed herein comprise mixing a first precursor and a second precursor in a mixing chamber. The first precursor and the second precursor can be provided to the mixing chamber in the gas phase or as liquids.
Public/Granted literature
- US2201481A Perforating apparatus Public/Granted day:1940-05-21
Information query
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