- 专利标题: MANUFACTURING APPARATUS AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
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申请号: US17921618申请日: 2021-07-06
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公开(公告)号: US20240105672A1公开(公告)日: 2024-03-28
- 发明人: Shigeru HAYATA , Osamu KAKUTANI
- 申请人: SHINKAWA LTD.
- 申请人地址: JP Tokyo
- 专利权人: SHINKAWA LTD.
- 当前专利权人: SHINKAWA LTD.
- 当前专利权人地址: JP Tokyo
- 国际申请: PCT/JP2021/025429 2021.07.06
- 进入国家日期: 2022-10-26
- 主分类号: H01L23/00
- IPC分类号: H01L23/00
摘要:
A wire bonding apparatus includes: a capillary, performing predetermined processing on a workpiece and movable with respect to the workpiece; an optical mechanism, moving together with the capillary; and a controller. The optical mechanism includes: a first imaging unit, acquiring a first image obtained by imaging a standard point set within an imaging range; and a second imaging unit, acquiring a second image obtained by imaging a reference point formed at a predetermined distance from the capillary. The controller positions the capillary with respect to the workpiece based on the first image, and calculates a positioning correction amount of the capillary based on the second image.
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