Invention Publication
- Patent Title: PLASMA PROCESSING DEVICE, HIGH-FREQUENCY POWER SUPPLY CIRCUIT, AND IMPEDANCE MATCHING METHOD
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Application No.: US18274808Application Date: 2022-01-19
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Publication No.: US20240120179A1Publication Date: 2024-04-11
- Inventor: Masaharu SHIRATANI , Kunihiro KAMATAKI , Kazunori KOGA , Takahiro SHINDO , Tatsuo MATSUDO
- Applicant: TOKYO ELECTRON LIMITED , KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED,KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION
- Current Assignee: TOKYO ELECTRON LIMITED,KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP 21012038 2021.01.28
- International Application: PCT/JP2022/001781 2022.01.19
- Date entered country: 2023-07-28
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H03H11/44

Abstract:
There is provided a plasma processing apparatus for performing plasma processing on a substrate, comprising: a processing container accommodating the substrate; an electrode to which a high-frequency power for generating plasma in the processing container is applied; a high-frequency power supply configured to apply the high-frequency power to the electrode; and a high-frequency power supply circuit configured to supply the high-frequency power from the high-frequency power supply to the electrode. The high-frequency power supply circuit comprises: a power supply path configured to supply a power from the high-frequency power supply to the electrode; and a matching device configured to match a high-frequency power supply-side impedance with a plasma-side impedance, the matching device comprising a negative impedance portion that is connected to the power supply path and realizes a negative impedance corresponding to a plasma-side impedance.
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