发明公开
- 专利标题： VAPOR DELIVERY APPARATUS, ASSOCIATED VAPOR PHASE REACTOR AND METHODS OF USE
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申请号： US18378222申请日： 2023-10-10
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公开(公告)号： US20240123416A1公开(公告)日： 2024-04-18
- 发明人: Leonard Rodriguez
- 申请人： ASM IP Holding B.V.
- 申请人地址： NL Almere
- 专利权人： ASM IP Holding B.V.
- 当前专利权人： ASM IP Holding B.V.
- 当前专利权人地址： NL Almere
- 主分类号： B01J8/18
- IPC分类号： B01J8/18 ; B01J8/24
摘要：
Vapor delivery apparatus configured for generating a gaseous precursor from solid source precursor particles in a fluidized bed are disclosed. In addition, vapor phase reactors including a vapor delivery apparatus including a fluidized bed of solid precursor are also disclosed. Methods for monitoring and a controlling a vapor delivery system including a fluidized bed also disclosed.
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