- 专利标题: METHOD FOR RULE-BASED RETARGETING OF TARGET PATTERN
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申请号: US17769107申请日: 2020-09-24
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公开(公告)号: US20240126183A1公开(公告)日: 2024-04-18
- 发明人: Ayman HAMOUDA
- 申请人: ASML NETHERLANDS B.V.
- 申请人地址: NL Veldhoven
- 专利权人: ASML NETHERLANDS B.V.
- 当前专利权人: ASML NETHERLANDS B.V.
- 当前专利权人地址: NL Veldhoven
- 国际申请: PCT/EP2020/076639 2020.09.24
- 进入国家日期: 2022-04-14
- 主分类号: G03F7/00
- IPC分类号: G03F7/00 ; G06F30/392
摘要:
A method for generating a retargeted pattern for a target pattern to be printed on a substrate. The method includes obtaining (i) the target pattern comprising at least one feature, the at least one feature having geometry including a first dimension and a second dimension, and (ii) a plurality of biasing rules defined as a function of the first dimension, the second dimension, and a property associated with features of the target pattern within a measurement region; determining values of the property at a plurality of locations on the at least one feature of the target pattern, each location surrounded by the measurement region; selecting, from the plurality of biasing rules based on the values of the property, a sub-set of biases; and generating the retargeted pattern by applying the selected sub-set of biases to the at least one feature of the target pattern.
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