Invention Publication
- Patent Title: DEPOSITION APPARATUS
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Application No.: US18489608Application Date: 2023-10-17
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Publication No.: US20240133021A1Publication Date: 2024-04-25
- Inventor: JONGBUN HAN , INAE HAN , Gan Young PARK , SUNGJONG PARK , DONGKIUN SEO
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si
- Priority: KR 20220137620 2022.10.23
- Main IPC: C23C14/24
- IPC: C23C14/24

Abstract:
A deposition apparatus includes: a vaporization portion to vaporize a first material, a second material, and a third material different from each other; and a first nozzle portion connected adjacent to the vaporization portion. The first nozzle portion includes: a first nozzle hole to discharge the first material; a second nozzle hole adjacent to the first nozzle hole and to discharge the second material; and a third nozzle hole adjacent to the first nozzle hole and the second nozzle hole and to discharge the third material.
Public/Granted literature
- US20240229223A9 DEPOSITION APPARATUS Public/Granted day:2024-07-11
Information query
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