- 专利标题: Integrated Strain and Piezoelectric Sensor System
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申请号: US17984006申请日: 2022-11-09
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公开(公告)号: US20240151596A1公开(公告)日: 2024-05-09
- 发明人: Masato Mizuta
- 申请人: Newport Sensors, Inc.
- 申请人地址: US CA Corona Del Mar
- 专利权人: Newport Sensors, Inc.
- 当前专利权人: Newport Sensors, Inc.
- 当前专利权人地址: US CA Corona Del Mar
- 主分类号: G01L1/16
- IPC分类号: G01L1/16 ; G01B7/16 ; H10N30/30 ; H10N30/87
摘要:
Systems, devices, and methods for a dual-sensor apparatus (101), comprising: a conductive substrate (124); a piezoelectric material (126) disposed on the conductive substrate (124); and an electrically conductive trace (102) disposed on the piezoelectric material (126) in a strain gauge pattern, where the electrically conductive trace (102) comprises two leads; where the conductive substrate (124) and the electrically conductive trace (102) serve as electrodes for the piezoelectric material (126) to form a piezoelectric sensor; and where the electrically conductive trace (102) serves as a strain sensor.
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