发明公开
- 专利标题: CUTTING APPARATUS
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申请号: US18500678申请日: 2023-11-02
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公开(公告)号: US20240165842A1公开(公告)日: 2024-05-23
- 发明人: Hayato IGA , Yuichi KITAZUMI , KwangYoung JUNG
- 申请人: DISCO CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: DISCO CORPORATION
- 当前专利权人: DISCO CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP 22183902 2022.11.17
- 主分类号: B26D5/00
- IPC分类号: B26D5/00 ; B26D1/04
摘要:
An image capturing unit includes a camera, an assembled lens that is connected to the camera and that magnifies a region to be imaged, a cover lens that covers an objective lens of the assembled lens, a fluid spray nozzle that sprays a fluid including water to the cover lens, a fluid removing nozzle that blows air to the cover lens to remove the fluid deposited on the cover lens, and a cutting water removing nozzle that blows air to a wafer positioned at a position directly under the cover lens, to remove cutting water stagnating on an upper surface of the wafer.
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