- 专利标题: Optical Modulator And Laser Interferometer
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申请号: US18522741申请日: 2023-11-29
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公开(公告)号: US20240176157A1公开(公告)日: 2024-05-30
- 发明人: Kohei YAMADA , Atsushi MATSUO
- 申请人: SEIKO EPSON CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: SEIKO EPSON CORPORATION
- 当前专利权人: SEIKO EPSON CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP 22191190 2022.11.30
- 主分类号: G02B27/10
- IPC分类号: G02B27/10 ; G01B9/02001
摘要:
An optical modulator includes: a vibrator configured to perform flexural vibration along a first direction; and a diffraction grating disposed in the vibrator and having a plurality of grooves arranged in parallel along the first direction. A frequency of laser light incident on the diffraction grating is shifted. In addition, it is preferable that the vibrator includes a base portion, a first vibration arm, and a second vibration arm disposed side by side along the first direction and coupled to the base portion, the first vibration arm and the second vibration arm perform the flexural vibration along the first direction, and the diffraction grating is disposed on at least one of the first vibration arm and the second vibration arm.
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