DETERMINING EQUIPMENT CONSTANT UPDATES BY MACHINE LEARNING
Abstract:
A method includes providing, to a trained machine learning model configured to determine a recommended adjustment to an equipment constant of a substrate manufacturing system, first input data indicative of a state of the substrate manufacturing system. The method further includes providing, to the trained machine learning model as second input data, an indication of a performed adjustment to the equipment constant. The method further includes retraining the trained machine learning model based on a difference between the recommended adjustment to the equipment constant and the performed adjustment to the equipment constant to generate a retrained machine learning model.
Information query
Patent Agency Ranking
0/0