Invention Publication
- Patent Title: DETERMINING EQUIPMENT CONSTANT UPDATES BY MACHINE LEARNING
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Application No.: US18542562Application Date: 2023-12-15
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Publication No.: US20240176338A1Publication Date: 2024-05-30
- Inventor: Thomas Ho Fai Li , Xiaoer Hu , Imaan Seraphine Islam Rahim
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G05B19/418
- IPC: G05B19/418

Abstract:
A method includes providing, to a trained machine learning model configured to determine a recommended adjustment to an equipment constant of a substrate manufacturing system, first input data indicative of a state of the substrate manufacturing system. The method further includes providing, to the trained machine learning model as second input data, an indication of a performed adjustment to the equipment constant. The method further includes retraining the trained machine learning model based on a difference between the recommended adjustment to the equipment constant and the performed adjustment to the equipment constant to generate a retrained machine learning model.
Information query
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