Invention Publication
- Patent Title: THREE-LAYERED STACKED IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME
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Application No.: US18354040Application Date: 2023-07-18
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Publication No.: US20240178259A1Publication Date: 2024-05-30
- Inventor: Doowon KWON , Minho JANG , Kyungtae LIM , Doyeon KIM , Haejung LEE
- Applicant: Samsung Electronics Co,, Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co, Ltd.
- Current Assignee: Samsung Electronics Co, Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR 20220163418 2022.11.29
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
The inventive concepts provide a three-layered stacked image sensor in which misalignment between a through electrode and a pad is reduced and coupling noise between adjacent pads is reduced, and methods of manufacturing the same. The three-layered stacked image sensor includes an upper chip including pixels arranged in a two-dimensional array structure and a first wiring layer, each of pixels including a photodiode, a transfer gate, and a floating diffusion region, an intermediate chip including a source follower gate, a select gate, and a reset gate corresponding to each of pixels, a first silicon layer, and a second wiring layer, and a lower chip including an image sensor processor, a third wiring layer, and a second silicon layer, a cross-section of an upper portion of a through electrode extending from the second wiring layer through the first silicon layer having an inverted trapezoidal structure.
Information query
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