Invention Publication
- Patent Title: SEMICONDUCTOR MANUFACTURING CHEMICAL COMPOUND MONITORING PROCESS
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Application No.: US18532190Application Date: 2023-12-07
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Publication No.: US20240192040A1Publication Date: 2024-06-13
- Inventor: Panagiota Arnou , Tom Van Kesteren , Mehmet Orhan Tas , Gido Van Der Star
- Applicant: ASM IP Holding B.V
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V
- Current Assignee: ASM IP Holding B.V
- Current Assignee Address: NL Almere
- Main IPC: G01F15/075
- IPC: G01F15/075 ; C23C16/455 ; C23C16/52
Abstract:
In general the various aspects of the technology of the present disclosure relate to semiconductor processing, and particularly to monitoring the amount of chemicals consumed by a semiconductor manufacturing process.
Information query
