Disclosed are inspection apparatuses and methods. The inspection apparatus includes a light source configured to irradiate a beam to an inspection object including a first part and a second part different from the first part; an inspection module spaced apart from the inspection object and onto which a beam, whose path is changed after being irradiated to the inspection object, is incident; and a separator between the inspection object and the inspection module and through which at least a portion of the beam, whose path is changed, passes. The separator includes: a frame in which an opening is defined, and a separation member in the opening and configured to change a path of a beam, which passes through the separator.