Invention Publication
- Patent Title: SEMICONDUTOR DEVICE
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Application No.: US18347418Application Date: 2023-07-05
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Publication No.: US20240215468A1Publication Date: 2024-06-27
- Inventor: Kyung Seop KIM , Chi Ho Kim , Young Cheol Song , Jae Wan Choi
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon
- Priority: KR 20220180405 2022.12.21
- Main IPC: H10N70/00
- IPC: H10N70/00 ; H10B63/00

Abstract:
A semiconductor device is provided. The semiconductor device according to an implementation of the disclosed technology may include a variable resistance layer; a selector layer disposed over or under the variable resistance layer; a first protective layer disposed on sidewalls of the variable resistance layer and sidewalls of the selector layer, the first protective layer including silicon (Si) and nitrogen (N) and having a nitrogen (N) content higher than a silicon (Si) content; and a second protective layer disposed over the first protective layer, the second protective layer including silicon (Si) and nitrogen (N) and having a silicon (Si) content higher than a nitrogen (N) content.
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