Invention Publication
- Patent Title: PREPARATION METHOD FOR ARRAY SUBSTRATE AND PREPARATION METHOD FOR DISPLAY PANEL
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Application No.: US18558740Application Date: 2022-07-01
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Publication No.: US20240234440A1Publication Date: 2024-07-11
- Inventor: Bin LIN , Yang WANG , Liangliang LI , Zengrong LI , Hangle GUO , Wenxing XI
- Applicant: Fuzhou BOE Optoelectronics Technology Co., Ltd. , BOE Technology Group Co., Ltd.
- Applicant Address: CN Fuzhou, Fujian
- Assignee: Fuzhou BOE Optoelectronics Technology Co., Ltd.,BOE Technology Group Co., Ltd.
- Current Assignee: Fuzhou BOE Optoelectronics Technology Co., Ltd.,BOE Technology Group Co., Ltd.
- Current Assignee Address: CN Fuzhou, Fujian
- Priority: CN 2110811863.7 2021.07.19
- International Application: PCT/CN2022/103344 2022.07.01
- Date entered country: 2023-11-02
- Main IPC: H01L27/12
- IPC: H01L27/12

Abstract:
Disclosed is a preparation method for an array substrate including: forming a first conductive portion on a substrate; sequentially forming a first insulating layer, a second insulating layer and a third insulating layer on the side of the first conductive portion that faces away from the substrate; forming, through one-time patterning process, a first sub-via that penetrates through the third insulating layer, the second insulating layer and a first part of the first insulating layer; forming a fourth insulating layer on the side of the third insulating layer that faces away from the substrate; etching and removing the fourth insulating layer and the first insulating layer of the second thickness that are at the first sub-via, so as to form a first via; and forming a first connection electrode on the side of the fourth insulating layer that faces away from the substrate.
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