METHOD FOR FORMING A PATHWAY IN A PRESSURE SENSOR HAVING A GLASS TO METAL SEAL
Abstract:
A method of manufacturing a pressure sensor for sensing a pressure of a process fluid includes obtaining a sensor body having a sensor cavity formed therein. A metal tube is placed through an opening in the sensor body into the sensor cavity. A rod is placed through the metal tube and into the sensor cavity. The sensor cavity is at least partially filled with a dielectric material and the dielectric material completely covers the metal tube carried in the sensor cavity and a portion of the rod. The rod is removed and thereby forming a dielectric passageway which is fluidically coupled to the metal tube. The sensor cavity is sealed with a deflectable diaphragm which is configured to deflect in response to applied pressure from the process fluid. A differential pressure sensor for sensing a differential pressure of a process fluid includes a sensor body having a sensor cavity formed therein is also provided.
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