- 专利标题: SAMPLE HOLDER AND IMPEDANCE MICROSCOPE
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申请号: US18562345申请日: 2022-05-24
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公开(公告)号: US20240242927A1公开(公告)日: 2024-07-18
- 发明人: Toshihiko OGURA
- 申请人: National Institute of Advanced Industrial Science and Technology
- 申请人地址: JP Chiyoda-ku, Tokyo
- 专利权人: National Institute of Advanced Industrial Science and Technology
- 当前专利权人: National Institute of Advanced Industrial Science and Technology
- 当前专利权人地址: JP Chiyoda-ku, Tokyo
- 优先权: JP 21087424 2021.05.25
- 国际申请: PCT/JP2022/021239 2022.05.24
- 进入国家日期: 2023-11-20
- 主分类号: H01J37/20
- IPC分类号: H01J37/20 ; H01J37/09 ; H01J37/24 ; H01J37/28
摘要:
A sample holder for an impedance microscope according to an aspect includes: a first insulating film having a front surface and a back surface; a second insulating film having a front surface facing the back surface of the first insulating film and a back surface; a conductive film disposed on the front surface of the first insulating film; an electrode disposed to face the back surface of the second insulating film; and a conductive member fixed at a ground potential or a constant potential, in which the conductive member has an opening located between the first insulating film and the electrode.
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