- 专利标题: CAPACITIVE, MEMS-TYPE ACOUSTIC TRANSDUCER HAVING SEPARATE SENSITIVE AND TRANSDUCTION AREAS AND MANUFACTURING PROCESS THEREOF
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申请号: US18416751申请日: 2024-01-18
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公开(公告)号: US20240259734A1公开(公告)日: 2024-08-01
- 发明人: Federico VERCESI , Fabrizio CERINI , Silvia ADORNO
- 申请人: STMICROELECTRONICS S.r.l.
- 申请人地址: IT Agrate Brianza
- 专利权人: STMICROELECTRONICS S.r.l.
- 当前专利权人: STMICROELECTRONICS S.r.l.
- 当前专利权人地址: IT Agrate Brianza
- 优先权: IT 2023000001191 2023.01.26
- 主分类号: H04R19/04
- IPC分类号: H04R19/04 ; H04R7/04 ; H04R7/18 ; H04R19/00 ; H04R31/00
摘要:
Capacitive, MEMS-type acoustic transducer, having a sound collection part and a transduction part. A substrate region surrounds a first chamber arranged in the sound collection part and open towards the outside; a fixed structure is coupled to the substrate region; a cap region is coupled to the fixed structure. A sensitive membrane is arranged in the sound collection part, is coupled to the fixed structure and faces the first chamber. A transduction chamber is arranged in the transduction part, hermetically closed with respect to the outside and accommodates a detection membrane. An articulated structure extends between the sensitive membrane and the detection membrane, through the walls of the transduction chamber. A fixed electrode faces and is capacitively coupled to the detection membrane. Conducive electrical connection regions extend above the substrate region, into the transduction chamber.
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