VIBRATION SENSOR AND MICROPHONE
摘要:
In a vibration sensor, both ends of a vibration beam are fixed on a base, and a middle portion is suspended in a cavity and generates deformation in response to external vibrational excitation. The portions, suspended in the cavity, of a plurality of vibration beams have different dimensions by changing a structure and a dimension of the cavity and a dimension and a position of each vibration beam, so that different vibration beams have different natural frequencies, and resonance peaks of different frequencies are generated under vibrational excitation, forming a wider frequency response range. In addition, a vibration signal selected by the vibration sensor is a vibration signal within a preset range near the resonance peak, and the sensitivity is relatively high. A microphone having the vibration sensor is also provided.
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