发明公开
- 专利标题: Probe Device
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申请号: US18566151申请日: 2021-06-29
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公开(公告)号: US20240288472A1公开(公告)日: 2024-08-29
- 发明人: Naoki SAMURA , Yasuhiko NARA
- 申请人: Hitachi High-Tech Corporation
- 申请人地址: JP Minato-ku, Tokyo
- 专利权人: Hitachi High-Tech Corporation
- 当前专利权人: Hitachi High-Tech Corporation
- 当前专利权人地址: JP Minato-ku, Tokyo
- 国际申请: PCT/JP2021/024581 2021.06.29
- 进入国家日期: 2023-12-01
- 主分类号: G01R1/067
- IPC分类号: G01R1/067 ; G01R1/04 ; G06T7/73
摘要:
A probe device includes a sample stage 125 that supports a sample, a probe unit 143 to which a probe 141 brought into contact with a predetermined sample surface of the sample is attached, a first camera 111A that images the sample and the probe, and a first camera optical axis adjustment stage 112A that adjusts an optical axis of the first camera, in which the optical axis of the first camera is parallel to the sample surface, and the first camera optical axis adjustment stage allows the optical axis of the first camera to be moved in a direction perpendicular to the sample surface.
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