Invention Publication
- Patent Title: DIE BENDING STIFFNESS MODIFICATION THROUGH GROOVING
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Application No.: US18175985Application Date: 2023-02-28
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Publication No.: US20240290730A1Publication Date: 2024-08-29
- Inventor: Sathyanarayanan Raghavan , Mukta Ghate Farooq , Prabudhya Roy Chowdhury
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/304 ; H01L23/053 ; H01L25/065

Abstract:
A semiconductor structure for tailoring a die stiffness. The semiconductor structure may include a packaging substrate, a lid, and a first semiconductor die between the packaging substrate and the lid. The first semiconductor die may have a frontside attached to the packaging substrate that has semiconductor devices. The first semiconductor die may also have a backside, opposite the frontside, that has grooves less than a thickness of the first semiconductor die.
Information query
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