DIE BENDING STIFFNESS MODIFICATION THROUGH GROOVING
Abstract:
A semiconductor structure for tailoring a die stiffness. The semiconductor structure may include a packaging substrate, a lid, and a first semiconductor die between the packaging substrate and the lid. The first semiconductor die may have a frontside attached to the packaging substrate that has semiconductor devices. The first semiconductor die may also have a backside, opposite the frontside, that has grooves less than a thickness of the first semiconductor die.
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