Invention Publication
- Patent Title: TOTAL OR LOCAL THICKNESS VARIATION FOR OPTICAL DEVICES
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Application No.: US18629636Application Date: 2024-04-08
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Publication No.: US20240295693A1Publication Date: 2024-09-05
- Inventor: Yingdong LUO , Zhengping YAO , Daihua ZHANG , David Alexander SELL , Jingyi YANG , Xiaopei DENG , Kevin MESSER , Samarth BHARGAVA , Rami HOURANI , Ludovic GODET
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G02B6/122
- IPC: G02B6/122 ; G02B6/12 ; G02B6/124 ; G02B6/13 ; G02B27/00

Abstract:
Embodiments of the present disclosure generally relate to methods for forming a waveguide. Methods may include measuring a waveguide substrate, the waveguide having a substrate thickness distribution; and depositing an index-matched layer onto a surface of the waveguide, the index-matched layer having a first surface disposed on the waveguide substrate and a second surface opposing the first surface, wherein the index-matched layer is disposed only over a portion of the waveguide substrate, and a device slope of a second surface of the index-matched layer is substantially the same as the waveguide slope of the first surface of the waveguide.
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