- 专利标题： LIQUID METAL PRINTED 2D ULTRAHIGH MOBILITY CONDUCTING OXIDE TRANSISTORS
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申请号： US18579031申请日： 2022-07-14
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公开(公告)号： US20240332017A1公开(公告)日： 2024-10-03
- 发明人: William SCHEIDELER , Andrew HAMLIN
- 申请人： TRUSTEES OF DARTMOUTH COLLEGE
- 申请人地址： US NH Hanover
- 专利权人： TRUSTEES OF DARTMOUTH COLLEGE
- 当前专利权人： TRUSTEES OF DARTMOUTH COLLEGE
- 当前专利权人地址： US NH Hanover
- 国际申请： PCT/US2022/037223 2022.07.14
- 进入国家日期： 2024-01-12
- 主分类号： H01L21/02
- IPC分类号： H01L21/02 ; H01L29/24 ; H01L29/66 ; H01L29/786
摘要：
In a liquid printing method, a second workpiece is applied onto a first workpiece. A metal on the second workpiece contacts a dielectric on the first workpiece thereby forming an alloyed oxide film. This can be used to form a liquid metal printed 2D alloyed oxide film transistor. The alloyed oxide film can be InOx or other materials.
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