Example methods and devices for improving uniformity of temperature distribution of a microheater or a microheater array are disclosed. One example method includes determining that a temperature of a first coil segment of multiple coil segments of a microheater is lower than a temperature of a second coil segment of the multiple coil segments, where the first coil segment is closer to an edge of the microheater than the second coil segment, and the microheater is a heating component of a microelectromechanical systems (MEMS) based device. A resistance of the first coil segment is increased through a reduction of a width of the first coil segment. After the reduction of the width of the first coil segment, a width of the second coil segment is adjusted based on a difference between the temperature of the first coil segment and the temperature of the second coil segment.