Invention Publication
- Patent Title: DEEP LEARNING-BASED DIGITAL HOLOGRAPHIC CONTINUOUS PHASE NOISE REDUCTION METHOD FOR MICROSTRUCTURE MEASUREMENT
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Application No.: US18599084Application Date: 2024-03-07
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Publication No.: US20240361727A1Publication Date: 2024-10-31
- Inventor: Benyong CHEN , Jianjun TANG , Liping YAN , Liu HUANG
- Applicant: ZHEJIANG SCI-TECH UNIVERSITY
- Applicant Address: CN Zhejiang
- Assignee: ZHEJIANG SCI-TECH UNIVERSITY
- Current Assignee: ZHEJIANG SCI-TECH UNIVERSITY
- Current Assignee Address: CN Zhejiang
- Priority: CN 2310482708.4 2023.04.28
- Main IPC: G03H1/08
- IPC: G03H1/08 ; G01B11/25 ; G03H1/16

Abstract:
A deep learning-based digital holographic continuous phase noise reduction method for microstructure measurement is provided. A MEMS microstructure is simulated to generate an object phase image through generation of random matrix superposition, noise in a digital holographic continuous phase map is simultaneously simulated to generate a noise grayscale image, and a simulation data set is thus created. An end-to-end convolutional neural network is designed, and a trained convolutional neural network is trained and obtained. A holographic interference pattern of an object under measurement is collected by photographing, and after spectrum extraction, angular spectrum diffraction, phase unwrapping, and distortion compensation, a continuous phase map containing only the object phase and noise is obtained and input into the trained convolutional neural network to obtain an object phase map. A simulation data set is accurately created in the disclosure, thereby the difficulty of collecting a large amount of experimental data is avoided.
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