- 专利标题: DEEP LEARNING-BASED DIGITAL HOLOGRAPHIC CONTINUOUS PHASE NOISE REDUCTION METHOD FOR MICROSTRUCTURE MEASUREMENT
-
申请号: US18599084申请日: 2024-03-07
-
公开(公告)号: US20240361727A1公开(公告)日: 2024-10-31
- 发明人: Benyong CHEN , Jianjun TANG , Liping YAN , Liu HUANG
- 申请人: ZHEJIANG SCI-TECH UNIVERSITY
- 申请人地址: CN Zhejiang
- 专利权人: ZHEJIANG SCI-TECH UNIVERSITY
- 当前专利权人: ZHEJIANG SCI-TECH UNIVERSITY
- 当前专利权人地址: CN Zhejiang
- 优先权: CN 2310482708.4 2023.04.28
- 主分类号: G03H1/08
- IPC分类号: G03H1/08 ; G01B11/25 ; G03H1/16
摘要:
A deep learning-based digital holographic continuous phase noise reduction method for microstructure measurement is provided. A MEMS microstructure is simulated to generate an object phase image through generation of random matrix superposition, noise in a digital holographic continuous phase map is simultaneously simulated to generate a noise grayscale image, and a simulation data set is thus created. An end-to-end convolutional neural network is designed, and a trained convolutional neural network is trained and obtained. A holographic interference pattern of an object under measurement is collected by photographing, and after spectrum extraction, angular spectrum diffraction, phase unwrapping, and distortion compensation, a continuous phase map containing only the object phase and noise is obtained and input into the trained convolutional neural network to obtain an object phase map. A simulation data set is accurately created in the disclosure, thereby the difficulty of collecting a large amount of experimental data is avoided.
信息查询