- 专利标题: DEVICES INCLUDING VERTICAL TRANSISTORS
-
申请号: US18771108申请日: 2024-07-12
-
公开(公告)号: US20240363763A1公开(公告)日: 2024-10-31
- 发明人: Kamal M. Karda , Durai Vishak Nirmal Ramaswamy , Haitao Liu
- 申请人: Micron Technology, Inc.
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 主分类号: H01L29/786
- IPC分类号: H01L29/786 ; H01L21/02 ; H01L21/8234 ; H01L29/66 ; H01L29/78
摘要:
A device comprises a vertical transistor and a shielding material comprising a conductive material having a P+ type conductivity. The vertical transistor includes an electrode, a dielectric material adjacent to the electrode, and a channel region adjacent to the dielectric material. The channel region comprises a composite structure including at least two semiconductor materials. Also disclosed is a device comprising a first electrically conductive line, vertical transistors overlying the first conductive line, a second electrically conductive line overlying the vertical transistors, and a shielding material positioned between the two adjacent vertical transistors. Each of the vertical transistors comprises a gate electrode, a gate dielectric material on opposite sides of the gate electrode, and a channel region comprising a composite structure including at least two oxide semiconductor materials. The gate dielectric material positions between the gate electrode and the channel region. The shielding material comprises an electrically conductive material.
信息查询
IPC分类: