- 专利标题: CONDUCTIVE LAYER AND PREPARATION METHOD THEREFOR, AND SOLAR CELL
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申请号: US18565924申请日: 2022-10-24
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公开(公告)号: US20240363785A1公开(公告)日: 2024-10-31
- 发明人: Lei XU , Jianfeng XUE , Kesheng WEI , Jin WANG
- 申请人: TONGWEI SOLAR (ANHUI) CO., LTD.
- 申请人地址: CN Hefei, Anhui
- 专利权人: TONGWEI SOLAR (ANHUI) CO., LTD.
- 当前专利权人: TONGWEI SOLAR (ANHUI) CO., LTD.
- 当前专利权人地址: CN Hefei, Anhui
- 优先权: CN 2210401548.1 2022.04.18
- 国际申请: PCT/CN2022/126912 2022.10.24
- 进入国家日期: 2023-11-30
- 主分类号: H01L31/074
- IPC分类号: H01L31/074 ; H01L31/0336 ; H01L31/18
摘要:
A conductive layer, comprising a first TCO layer, a second TCO layer, a third TCO layer and a fourth TCO layer which are stacked. The first TCO layer is prepared in a first atmosphere, and the first atmosphere is a mixed gas of argon and hydrogen; the second TCO layer is prepared in a second atmosphere, the second atmosphere is a mixed gas of argon, hydrogen, and oxygen, a partial pressure gradient of hydrogen is reduced, and a partial pressure gradient of oxygen is increased; the third TCO layer is prepared in a third atmosphere, and the third atmosphere is a mixed gas of argon and oxygen; the fourth TCO layer is prepared in a fourth atmosphere, the fourth atmosphere is a mixed gas of argon and oxygen, and a partial pressure gradient of oxygen is decreased.
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