Invention Application
- Patent Title: LASER APPARATUS, METHOD FOR MEASURING SPECTRAL LINEWIDTH, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES
-
Application No.: US18807455Application Date: 2024-08-16
-
Publication No.: US20240405502A1Publication Date: 2024-12-05
- Inventor: Kazuhiro SUZUKI , Hiroshi TANAKA
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Main IPC: H01S3/10
- IPC: H01S3/10 ; G03F7/20 ; H01S3/13

Abstract:
A laser apparatus includes: a laser oscillator including a wavelength adjuster and configured to output pulse laser light having a center wavelength adjusted by the wavelength adjuster; a spectrum monitor configured to generate data on a spectrum of the pulse laser light; and a processor configured to control the wavelength adjuster in such a way that the center wavelength of the pulse laser light changes in accordance with a target wavelength that periodically changes to each of multiple values including first and second wavelengths, calculate a first spectral linewidth from data on spectra of multiple pulses each having the first wavelength as the target wavelength, and calculate a second spectral linewidth from data on spectra of multiple pulses each having the second wavelength as the target wavelength.
Information query