Invention Application
- Patent Title: Method and System for Sample Preparation
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Application No.: US18731712Application Date: 2024-06-03
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Publication No.: US20240426717A1Publication Date: 2024-12-26
- Inventor: Jakub Kuba , Pavel Krepelka , Miloš Hovorka , John Mitchels , Radim Kríž , Matej Dolník
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Main IPC: G01N1/28
- IPC: G01N1/28 ; G06T7/73 ; G06V10/25 ; G06V20/69 ; H01J37/20
Abstract:
A sample is milled to expose the region of interest (ROI) within the sample, while being held by a sample stage in a microscopy system. The sample is milled based on the ROI location determined with sample images acquired with light beam irradiating from different axes. The sample images are acquired while the sample is held using the same sample stage for milling.
Information query
