Invention Application
- Patent Title: AUTO PARAMETER TUNING FOR CHARGED PARTICLE INSPECTION IMAGE ALIGNMENT
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Application No.: US18716111Application Date: 2022-11-18
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Publication No.: US20250036030A1Publication Date: 2025-01-30
- Inventor: Haoyi LIANG , Ye GUO , Zhichao CHEN
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- International Application: PCT/EP2022/082520 WO 20221118
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F1/84 ; G06T7/00 ; G06T7/30 ; H01L21/66
Abstract:
An improved method and system for image alignment of an inspection image are disclosed. An improved method comprises acquiring an inspection image, acquiring a reference image corresponding to the inspection image, acquiring a target alignment between the inspection image and the reference image based on characteristics of the inspection image and the reference image, estimating an alignment parameter based on the target alignment, and applying the alignment parameter to a subsequent inspection image.
Information query
