Invention Application
- Patent Title: FABRICATION OF ELECTROPLATED NICKEL-IRON LAYERS WITH TITANIUM-COPPER SEED LAYER
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Application No.: US18448657Application Date: 2023-08-11
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Publication No.: US20250057051A1Publication Date: 2025-02-13
- Inventor: Michael KIRSCH , Patrick HANEKAMP , Werner ROBL , Klemens PRÜGL , Juergen ZIMMER , Christoph OSWALD
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Main IPC: H10N50/85
- IPC: H10N50/85 ; C23C14/16 ; C23C14/34 ; C23C28/02 ; C25D3/56 ; C25D5/02 ; C25D7/12 ; G01R33/02 ; H10N50/01 ; H10N59/00

Abstract:
A layered structure includes a silicon-based substrate comprising a substrate surface; a titanium-copper seed layer arranged on the substrate surface, wherein the titanium-copper seed layer comprises a titanium layer and a copper layer, wherein the titanium layer is arranged on the substrate surface such that covalent bonds are formed between the titanium layer and silicon of the silicon-based substrate, and wherein the copper layer is arranged directly on the titanium layer, such that the titanium layer is arranged between the substrate surface and the copper layer; and a nickel-iron plating layer arranged directly on the copper layer of the titanium-copper seed layer such that the titanium-copper seed layer is arranged between the silicon-based substrate and the nickel-iron plating layer.
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