Invention Application
- Patent Title: OPTICAL SPECTRUM SENSOR WAFER OR ROBOT FOR CHAMBER CONDITION MONITORING
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Application No.: US18948311Application Date: 2024-11-14
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Publication No.: US20250069868A1Publication Date: 2025-02-27
- Inventor: Chuang-Chia Lin , Wenwei Qiao
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01J37/32
- IPC: H01J37/32 ; B08B9/46 ; B25J11/00 ; G01J3/02 ; G01J3/10
Abstract:
Embodiments disclosed herein include a diagnostic substrate. In an embodiment, the diagnostic substrate comprises a substrate, a circuit board on the substrate, and a spectrometer coupled to the circuit board. In an embodiment, the diagnostic substrate further comprises a processor on the circuit board and communicatively coupled to the spectrometer.
Information query
