Invention Application
- Patent Title: DEPOSITION MASK AND METHOD OF FABRICATING THE SAME
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Application No.: US18734300Application Date: 2024-06-05
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Publication No.: US20250101567A1Publication Date: 2025-03-27
- Inventor: Jeong Kuk KIM , Young Min MOON , Jun Ho JO
- Applicant: Samsung Display Co., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., LTD.
- Current Assignee: Samsung Display Co., LTD.
- Current Assignee Address: KR Yongin-si
- Priority: KR10-2023-0128901 20230926
- Main IPC: C23C14/04
- IPC: C23C14/04 ; C25D5/02 ; C25D5/54 ; H10K59/12

Abstract:
A method of fabricating a mask includes defining cell areas and a mask frame area on a silicon substrate, the mask frame area excluding the cell areas, the mask frame area may include a mask rib region partitioning the cell areas and an outer frame region disposed at an outermost position of the silicon substrate, forming a groove in the mask rib region, forming a metal mask rib by forming a metal in the groove, forming a photoresist pattern including openings in each of the cell areas, growing a plating film in each of the cell areas, forming a mask membrane formed of the plating film by removing the photoresist pattern, and etching a rear surface of the silicon substrate to form cell openings associated with the cell areas, respectively.
Information query
IPC分类: