发明授权
- 专利标题: Centrifugal support for workpieces
- 专利标题(中): 离心支持工件
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申请号: US631013申请日: 1975-11-12
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公开(公告)号: US3993018A公开(公告)日: 1976-11-23
- 发明人: John R. Kranik , Wolfgang F. Mueller
- 申请人: John R. Kranik , Wolfgang F. Mueller
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: B23Q39/04
- IPC分类号: B23Q39/04 ; B05C11/08 ; C23C14/50 ; H01L21/265 ; H01L21/687 ; B05C11/02
摘要:
A chuck for a workpiece, rotatable in spaced relation to and about an axis of rotation, and having a clamp jaw radially movable under centrifugal force to engage the workpiece against fixed mating clamp members. The structure can also have optional means enabling the chuck to tilt, with the workpiece, from a home position to a preselected angle under the rotation thereof about a pivot axis perpendicular to and spaced from the axis of rotation with return of the chuck to the home position under gravitational force when rotation thereof is stopped.
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