发明授权
- 专利标题: Evaporation boats for use in vapor deposition
- 专利标题(中): 用于气相沉积的蒸发船
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申请号: US715716申请日: 1976-08-19
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公开(公告)号: US4043748A公开(公告)日: 1977-08-23
- 发明人: Kiyoshi Watanabe , Kazuo Sunahara , Motoyasu Terao , Tsutomu Fujita
- 申请人: Kiyoshi Watanabe , Kazuo Sunahara , Motoyasu Terao , Tsutomu Fujita
- 申请人地址: JA Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JA Tokyo
- 优先权: JA50-150560 19751212
- 主分类号: C23C14/24
- IPC分类号: C23C14/24 ; C23C14/26 ; F27B21/04
摘要:
The evaporation boat comprises superposed upper and lower sheets. The upper sheet includes a upwardly convexed central section and a pair of side sections bent back toward the central section and the lower sheet includes a downwardly convexed central section and a pair of side sections bent inwardly toward the upper sheet. The upper and lower sheets are superposed each other such that the central sections of the upper and lower sheets define a substantially closed chamber for accomodating source material to be evaporated, that slit shaped vapor passages are formed between the upper and lower sheets or the opposite sides of the chamber and that any straight line drawn between any point on the surface of the source material and any point in the passages intersects the inner wall of the upper or lower sheets.
公开/授权文献
- US5808877A Multichip package having exposed common pads 公开/授权日:1998-09-15
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