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US4049940A Devices and methods of using HF waves to energize a column of gas enclosed in an insulating casing 失效
使用HF波激励封闭在绝缘壳体中的气体柱的装置和方法

Devices and methods of using HF waves to energize a column of gas
enclosed in an insulating casing
摘要:
A device which generates plasma by energizing a column of gas with a high frequency periodic electric field of a frequency of at least 100MHz. The generating means extends over only a part of the gas column and the power of the energizing field is such that the plasma generated includes and extends beyond said part of the gas column. In one embodiment the gas column is contained in an elongated insulating casing and the generating means comprises a first metallic tube open at both ends and surrounding a part of the casing, a second tube enclosing the first, and a connecting ring between the first and second tubes.
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