发明授权
- 专利标题: Electroplating anode plenum
- 专利标题(中): 电镀阳极增压室
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申请号: US682729申请日: 1976-05-03
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公开(公告)号: US4062755A公开(公告)日: 1977-12-13
- 发明人: Dennis Robert Turner
- 申请人: Dennis Robert Turner
- 申请人地址: NJ Murray Hill
- 专利权人: Bell Telephone Laboratories, Incorporated
- 当前专利权人: Bell Telephone Laboratories, Incorporated
- 当前专利权人地址: NJ Murray Hill
- 主分类号: C25D5/08
- IPC分类号: C25D5/08 ; C25D17/10 ; C25C1/08 ; C25C7/02
摘要:
The anode of an electroplating apparatus is incorporated in a sparging plenum. The plenum has an insulating partition separating the anodically biased electrode from the workpieces being plated. The partition has a regular array of orifices. Electrolyte is pumped into the plenum and flows out of the partition, providing a spacially uniform supply of fresh solution to the workpieces. In a soluble anode process, the solution is replenished in the plenum. In an exemplary apparatus, one major surface of the plenum is a titanium tray, which holds pieces of nickel, which dissolve during the nickel plating process.
公开/授权文献
- US5773949A Cutter fracture detecting system 公开/授权日:1998-06-30
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